Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications (Topics in Applied Physics)

Applications

von: Rainer Behrisch · Klaus Wittmaack

Taschenbuch

ISBN-13: 978-3-662-31104-2

ISBN-10: 3-662-31104-6

Springer · 2013

Siehe auch:
1991Gebundene AusgabeSputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications (Topics in Applied Physics)