Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications (Topics in Applied Physics (64), Band 64)
von:
Rainer Behrisch
·
Klaus Wittmaack
·
R. Behrisch
·
W. Hauffe
·
W.O. Hofer
· N. Laegreid · E.D. McClanahan · B.U.R. Sundqvist
Gebunden
Details (
Deutschland
)
ISBN-13: 978-3-540-53428-0
ISBN-10: 3-540-53428-8
Springer
· 1991
Siehe auch:
2013
Taschenbuch
Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications (Topics in Applied Physics)
1991
Hardcover
Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications (Topics in Applied Physics; 64 Intelligence; 535)