INVESTIGATIONS ON MAGNETRON SPUTTERED TANTALUM OXIDE FILMS: Microelectronic device applications

INVESTIGATIONS

von: S. V. Jagadeesh Chandra · S Uthanna · G Mohan Rao

Taschenbuch

ISBN-13: 978-3-8433-9422-2

ISBN-10: 3-8433-9422-9

LAP LAMBERT Academic Publishing · 2011