THIN MEMBRANES FOR MEMS PACKAGING AT LOW T: THIN ELECTROPLATED MEMBRANES FOR MEMS PACKAGING AT TEMPERATURES BELOW 200 ºC

TEMPERATURES

von Raquel Hellín Rico

Taschenbuch

ISBN-13: 978-3-8383-4713-4

ISBN-10: 3-8383-4713-7

LAP Lambert Academic Publishing · 2010