Understanding Key Molecular Properties in a CVD Process Feasibility Study: Design of Volatile Non-halogenated Precursors for the Chemical Vapor Deposition (CVD) of Copper

Feasibility

von Rolf U Claessen

Taschenbuch

ISBN: 978-3-8311-4274-3

ISBN-10: 3-8311-4274-2

BoD - Books on Demand · 2002