ICPT 2007: International Conference on Planarization/CMP Technology / October 25 - 27, 2007 / Dresden, Germany / Proceedings

Planarization

von Micro- and Precision Engineering VDI-Society Microelectronics

Gebunden

ISBN-13: 978-3-8007-3065-0

ISBN-10: 3-8007-3065-0

VDE VERLAG · 2007