EMLC 2007: 23rd European Mask and Lithography Conference, Lectures held at the GMM Conference January 22 - 26, 2007 in Grenoble, France, Proceedings of SPIE in cooperation with VDE/VDI/ GMM

von Micro- and Precision Engineering (GMM) VDE/VDI Society Microelectronics

CD-ROM

Details (Deutschland)

ISBN-13: 978-3-8007-3032-2

ISBN-10: 3-8007-3032-4

VDE VERLAG · 2007