Process Modeling of Chemical Mechanical Planarization: An Integrated Model from Abrasive Scale to Chip Scale; Basics, Characterizations, Modeling and Verification

Planarization

von Jihong Choi

Taschenbuch

ISBN-13: 978-3-639-00166-2

ISBN-10: 3-639-00166-4

VDM Verlag · 2008