Film Deposition by Plasma Techniques (Springer Series on Atomic, Optical, and Plasma Physics (10))

Deposition

von Mitsuharu Konuma

Gebunden

ISBN: 978-3-540-54057-1

ISBN-10: 3-540-54057-1

Springer · 1992

S. auch:
1992TaschenbuchFilm Deposition by Plasma Techniques (Springer Series on Atomic, Optical, and Plasma Physics, Band 10)
1992HardcoverFilm Deposition by Plasma Techniques (Springer Series on Atoms and Plasmas)