Film Deposition by Plasma Techniques (Springer Series on Atomic, Optical, and Plasma Physics (10))
von
Mitsuharu Konuma
Gebunden
Details (
Deutschland
)
ISBN: 978-3-540-54057-1
ISBN-10: 3-540-54057-1
Springer
· 1992
S. auch:
1992
Taschenbuch
Film Deposition by Plasma Techniques (Springer Series on Atomic, Optical, and Plasma Physics, Band 10)
1992
Hardcover
Film Deposition by Plasma Techniques (Springer Series on Atoms and Plasmas)