LPCVD Silicon Nitride and Oxynitride Films: Material and Applications in Integrated Circuit Technology (Research Reports Esprit (1), Band 1)

Oxynitride

von F.H.P.M. Habraken

Taschenbuch

ISBN-13: 978-3-540-53954-4

ISBN-10: 3-540-53954-9

Springer · 1991
Siehe auch:
1991PaperbackLpcvd Silicon Nitride and Oxynitride Films: Material and Applications in Integrated Circuit Technology (Lecture Notes in Computer Science)