Sputtering by Particle Bombardment I: Physical Sputtering of Single-Element Solids (Topics in Applied Physics, Band 47)

Sputtering

von R. Behrisch

Gebunden

EAN=ISBN-13: 978-3-540-10521-3

ISBN-10: 3-540-10521-2

Springer · 1981

S. auch:
2014TaschenbuchSputtering by Particle Bombardment I: Physical Sputtering of Single-Element Solids (Topics in Applied Physics)