Catalytic Chemical Vapor Deposition: Technology and Applications of Cat-CVD

Technology

von: Hideki Matsumura · Hironobu Umemoto · Karen K. Gleason · Ruud E.I. Schropp

Gebunden

ISBN-13: 978-3-527-34523-6

ISBN-10: 3-527-34523-X

Wiley-VCH · April 2019