Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications (Advanced Micro and Nanosystems, Band 5)

Fundamentals

von: Norbert Kockmann · Oliver Brand · Gary K. Fedder · Christofer Hierold · Jan G. Korvink · Osamu Tabata

Gebunden

ISBN: 978-3-527-31246-7

ISBN-10: 3-527-31246-3

Wiley-VCH · 2006

S. auch:
2013TaschenbuchMicro Process Engineering: Fundamentals, Devices, Fabrication, and Applications (Advanced Micro and Nanosystems)